Analytical Potential

The creation of favorable conditions for the complex analysis of specimens, together with the possibility of high-quality images of the specimen surface for morphological studies, was a high priority in the design of Tescan microscopes from the beginning of their development.

A backscattered electron detector with a single-crystal YAG (Yttrium Aluminum Garnet) scintillator is offered with all of the VEGA SEM and MIRA FE-SEM models in order to allow material contrast imaging. This detector provides excellent sensitivity and high imaging resolution, as well as exceptional atomic number resolution.

All Tescan SEMs are designed with a modern 90° conical objective lens, allowing high sample tilts at short working distances, as well as high X-ray detector mounting angles. Combined with optimized detector port locations and the fully tilt-eucentric specimen stage, the analytical geometry of the VEGA is ideal for qualitative and quantitative X-ray analysis. Depending on the diameter of the detector, the SEM allows excellent 35° to 45° X-ray take-off angles at analytical working distances from 10mm to 25mm, with

normal beam incidence on non-tilted samples. The SEM chambers are provided with ports for interfacing wavelength-dispersive (WDX) and energy-dispersive (EDX) X-ray spectrometers.

Tescan SEMs also provide excellent support for electron backscattered diffraction (EBSD) analysis, with dedicated EBSD detector ports, fully tilt-eucentric/ compucentric stages, and complete

column and stage automation capabilities. And lastly, the VEGA SEMs allow comprehensive integration and control by all popular EBSD systems. So no matter which EBSD system you choose, you’ll be able to take advantage of all it’s capabilities, from determining the orientation of single crystals to fully automated texture analysis of large sample domains.

Detectors offered include the original Low Vacuum Secondary Tescan Detector - LVSTD, patented by Tescan. This detector allows true secondary electron imaging under low vacuum conditions.

The transmission electron (TE) detector provides a complementary method of the acquiring of information about a specimen. The TE detector offered for the VEGA microscopes affords a high resolution and the capabilities of both bright-field and dark-field imaging.

Lastly, serious consideration should be given to the quality and cleanliness of the vacuum system, which has increased in importance due to the popularity of light element X-ray detectors on modern analytical SEMs. All VEGA SEMs incorporate fully automatic, turbomolecular-pumped vacuum systems to minimize chamber contamination, allowing high quality, accurate quantitative analysis.