Index - czech / english / deutch
Products - Chambers of the VEGA SEMs

VEGA SEM Chambers

The creation of favourable conditions for the complex analysis of specimens, combined with high performance imaging capabilities, were high priorities in the design of the VEGA microscope chambers from the beginning. The carefully considered chamber designs, accurate eucentric/compucentric stages, and a number of ports optimized for a wide choice of atachable detectors.

The VEGA microscopes comes with 4  different types of chamber (SB, LS, LM, XM) that predestine the current model:

Type of chamber – SB
Small chamber, manual eucentric stage
Chamber
Internal size ø160 mm
Door width 120 mm
Number of Ports 8
Chamber suspension mechanic
Specimen stage
Type Eucentric
Movements X= 40 mm - manual
Y= 24 mm - manual
Z= 27 mm - manual
Z'= 6 mm - manual
Rot.: 360° continuous - manual
Tilt: -90° to +90° - eucentrically - manual

Option: Motorized XYR stage movements (45×45mm × 360°)


 
Type of chamber – LS
Large chamber, 5-axis motorized stage
Chamber
Internal size ø230 mm
Door width 148 mm
Number of Ports 11
Chamber suspension mechanic
Specimen stage
Type compucentric
Movements X= 40 mm
Y= 40 mm
Z= 47 mm
Rot.: 360° continuous
Tilt: -75° to +50°
Maximum specimen height 60mm

Option: Extended range of X×Y movements (40×60mm, 60×60mm, 80×40mm, 80×60mm, 60×40mm)


 
Type of chamber – LM
Large chamber, 5-axis extended motorized stage
Chamber
Internal size ø230 mm
Door width 148 mm
Number of Ports 11
Chamber suspension pneumatic, or optional active vibration isolation
Specimen stage
Type compucentric
Movements X= 80 mm
Y= 60 mm
Z= 47 mm
Rot.: 360° continuous
Tilt: -75° to +50°
Maximum specimen height 60mm

 
Type of chamber – XM
Extra large chamber, robust 5-axis motorized stage
Chamber
Internal size 300 mm × 330 mm
Door size 280 mm × 310 mm
Number of Ports 9+
Chamber suspension pneumatic, or optional active vibration isolation
Specimen stage
Type compucentric
Movements X= 130 mm
Y= 130 mm
Z= 100 mm
Rot.: 360° continuous
Tilt: -20° to +80°
Maximum specimen height 143 mm