Low Vacuum Mode

The vacuum system consists of powerful rotary and turbomolecular pumps and requires no cooling water. Obtaining of the working vacuum is quick. It takes typically less than 3 minutes.

An autonomous vacuum control unit, equipped with a microprocessor, reads the current state of the system using gauges and various sensors which communicates with the main computer and ensures vacuum stability.

The Vacuum system of Tescan's microscopes is designed to supporting two modifications. This leads into two microscope categories: a high vacuum type HiVac and a variable pressure UniVac type.

• HiVac - conventional models operating at a high vacuum in range of 10^-3 Pa in the specimen chamber.
• UniVac – variable pressure SEM, which combines the advantages of the high vacuum model with extended facility for low vacuum operation. In low vacuum mode, nonconductive specimens can be examined in their natural, uncoated state.

  Oparation is possible at pressures up to 150 Pa for the VEGA nad MIRA series and in Resolution mode at pressures up to 500 Pa only for the VEGA series (operation at chamber pressures up to 2000 Pa optionally available).