The LYRA\ is a favorable combination of the electron and ion
sources and optical columns attached on one chamber. It extends
imaging qualities of the scanning electron microscope with
the possibility of surface modification by a focused ion beam.
SEM Specific Features
- A unique four-lens Wide Field Optics™ design offering
the variety of working and displaying modes embodying
the Tescan proprietary Intermediate Lens for the beam
aperture optimization
- Fast imaging rate, using first class YAG detectors
- Fully automated microscope set-up including electron optics set-up and alignment
- Live stereoscopic imaging for accurate 3D navigation
- Network operations and built-in remote
access/diagnostics, all come as a Tescan standard
- 5-axis fully motorized compucentric stage with
extra wide range of movements
FIB Specific Features
- Unique ion optic column differentially pumped, with
2 ion pumps, for ultra-low ion scattering effect
- Motorized aperture changer with ultra-high reproducibility
- Beam Blanker and Faraday cup included as a standard
- Simultaneous SEM imaging with FIB etching or deposition
- FIB control is fully integrated in the SEM software
- Powerful toolbox for basic shapes creation
with programmable process parameters
GIS Option Features
- Ideal geometrical configuration with respect to
SEM and FIB columns
- 5 independent gas reservoirs with capillaries
- 3-axis microstage with automatic nozzles positioning
- Automated temperature control
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