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Products – LYRA\ XMH

LYRA\ XMU

Focused Ion Beam Equipped
Scanning Electron Microscope with an Extra Large Chamber.

  • A unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimization
  • Fast imaging rate, using first class YAG detectors
  • Fully automated microscope set-up including electron optics set-up and alignment
  • Live stereoscopic imaging for accurate 3D navigation
  • Network operations and built-in remote access/diagnostics, all come as a Tescan standard
  • 5-axis fully motorized compucentric stage with extra wide range of movements

FIB Specific Features

  • Unique ion optic column differentially pumped, with 2 ion pumps, for ultra-low ion scattering effect
  • Motorized aperture changer with ultra-high reproducibility
  • Beam Blanker and Faraday cup included as a standard
  • Simultaneous SEM imaging with FIB etching or deposition
  • FIB control is fully integrated in the SEM software
  • Powerful toolbox for basic shapes creation with programmable process parameters

GIS Option Features

  • Ideal geometrical configuration with respect to SEM and FIB columns
  • 5 independent gas reservoirs with capillaries
  • 3-axis microstage with automatic nozzles positioning
  • Automated temperature control

    • Standard Gases for GIS*:

  • Tungsten metal deposition
  • Platinum metal deposition
  • Insulator (SiOx) deposition
  • Enhanced etching of diamond and PMMA (H2O)
  • Enhanced or selective etching of Si, SiO2, Si3N4, W (XeF2)
* Other gases upon request

The LYRA I XMU Essential Specifications:

SEM FIB
Electron/ Ion Gun
Tungsten heated filament Ga liquid metal ion source
Resolution
 3.5 nm at 30 kV <5 nm at 30 kV
Magnification 3× – 1,000,000× 150× – 1,000,000×
Accelerating Voltage 200 V to 30 kV 1 kV to 5 kV;
10 kV to 30 kV
Probe Current 1 pA to 2 μA 1 pA to 20 nA
Gun vacuum < 1 × 10-2 Pa < 5 × 10-6 Pa
Chamber Vacuum < 1 × 10-2 Pa < 1 × 10-2 Pa
Scanning
Working Modes Resolution, Depth, Field, Wide Field, Rocking Beam, 3D Beam Live stereoscopic imaging, E-Beam induced deposition*, E-Beam Litography Imaging, SEM-FIB Simultaneous Imaging, Etching, Polishing, Selective etching*, I-Beam induced deposition*
* Only if GIS option is installed
Scanning Features Focus Window, Dynamic Focus, Point & Linescan, Tilt Correction, 3D Beam, Focus window, Poin, Line, Rectangle, Circle, Ring, Staris, Bitmap, Text
Scanning Speed 160 ns to 10 ms per pixel 160 ns to 10 ms per pixel
Digital Output
Image size up to 8,192×8,192 pixels
Bit Depth 16-bits per channel
System control
PC Control All functions are fully PC controlled by means of the LyraTC GUI software on a Windows™ platform
Controlers trackball
Chamber XM
Internal Dimensions 300 mm (width) x 300 mm (depth)
Door Size 280 mm (width) x 310 mm (height)
Number of Ports 9+
Chamber Suspension pneumatic or optional active vibration isolation
Specimen Stage
Type 5-axis fully motorized, compucentric
Movements
X = 130 mm
Y = 130 mm
Z = 100 mm
Rot.: 360° continuous
Tilt*: -20° to +80°
Maximum Specimen Height 137 mm
+ Standard number and configuration of ports can be modified to customer needs
* from WD 15 mm and for eucentric height of the specimen
Detectors
SE Everhardt-Thornley Standard
Retractable BSE Standard
LVSTD Option
TE Detector Option
CL Detector Option
EBIC Option
EDX* Option
EBSD* Option
Accessories
Probe Current Measurement Standard
Touch Alarm Standard
IR Chamber View Camera Standard
FIB Beam Blanker Standard
SEM Beam Blanker Option
Gas Injection System* Option
Active Vibration Isolation* Option
Magnetic Field Cancelling System* Option
Nanomanipulators* Option
Optionstandard, Option option, – not available
* Fully integrated third party tools

Wide Field Optics™ is the trademark of TESCAN, s.r.o.
Windows™ is the trademark of the Microsoft Corporation.
We are constantly improving the performance of our products, so all specifications are subject to change without notice.