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Products – MIRA\\ XMU-CS

MIRA\\ XMU-CS

High Resolution Schottky FE SEM with an Extra Large Chamber and Variable Pressure Operation. Compact Solution.

The Most Important Features:

  • High brightness Schottky emitter for high-resolution / high-current / low-noise imaging.
  • A unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimization.
  • Real time In-Flight Beam Tracing™ for the performance and spot optimization integrating the well established software Electron Optical Design.
  • Unique live stereoscopic imaging with 3D Beam Technology.
  • First class YAG-based detectors for fast imaging rate.
  • High-throughput large–area automation, e.g. automated particle location and analysis.
  • Extraordinary analytical potential – 9 chamber ports with optimized analytical geometry.
  • Fully automated microscope set-up including electron optics set-up and alignment.
  • Sophisticated software for SEM control, image acquisition, archiving, processing and analysis.
  • Network operations and built-in remote access/diagnostics come as a Tescan standard.

The MIRA II XMU Essential Specifications:

Resolution
Resolution (SE)
High Vacuum

Low Vacuum
1.2 nm at 30 kV
2.5 nm at 3 kV
1.5 nm at 30 kV (LVSTD)
3 nm at 3 kV (LVSTD)
Resolution (BSE) 2 nm at 30 kV
Working Vacuum
Chamber Vacuum
High Vacuum Mode
Low Vacuum Mode
< 1 × 10-2 Pa
    7-150 Pa
Gun vacuum < 1 × 10-6 Pa
Magnification 3× – 1,000,000×
Accelerating Voltage 200 V to 30 kV
Electron Gun High brightness Schottky emitter
Probe Current 2 pA to 40 nA
Scanning
Electron Optics Working Modes Resolution, Depth, Field, Wide Field, Rocking Beam
Scanning Speed 160 ns to 10 ms per pixel
Focus Window: Shape, size and position continuously adjustable
Digital Output
Image size up to 8,192×8,192 pixels
Bit Depth 16-bits per channel
Microscope control
PC Control All microscope functions are fully PC controlled by means of the MiraTC GUI software on a Windows™ platform
Controlers trackball
Remote Control Via TCP/IP
Automatic procedures Probe Current and Spot Size continuously adjustable by unique In-Flight Beam Tracing™, Vacuum control, Objective Alignment, Gun Alignment, Compensation for kV, Probe Current optimised for Spot Size, Spot Size optimised for Magnification, Scanning Speed, Contrast & Brightness, Focus & Stigmator, Look up Table
Chamber XM
Internal Dimensions 300 mm (width)
x 300 mm (depth)
Door Size 280 mm (width)
x 310 mm (height)
Number of Ports 9+
Chamber Suspension pneumatic or optional active vibration isolation
Specimen Stage
Type 5-axis fully motorized, compucentric
Movements
X = 130 mm
Y = 130 mm
Z = 100 mm
Rot.: 360° continuous
Tilt*: -20° to +80°
Maximum Specimen Height 143 mm
+ Standard number and configuration of ports can be modified to customer needs
* from WD 15 mm and for eucentric height of the specimen
Detectors
SE Everhardt-Thornley Standard
Retractable BSE Standard
LVSTD Option
TE Detector Option
CL Detector Option
EBIC Option
EDX* Option
WDX* Option
EBSD* Option
Accessories
Probe Current Measurement Standard
Touch Alarm Standard
IR Chamber View Camera Standard
Peltier Cooling Stage Option
Beam Blanker Option
Active Vibration Isolation* Option
Magnetic Field Cancelling System* Option
Nanomanipulators* Option
Optionstandard, Option option, – not available
* Fully integrated third party tools

Wide Field Optics™ and In-Flight Beam Tracing™ are trademarks of TESCAN, s.r.o.
Windows™ is the trademark of the Microsoft Corporation.
We are constantly improving the performance of our products, so all specifications are subject to change without notice.