Wide Field Optics™ - more...
An ingenious column design with no mechanical centering elements embodies Tescan proprietary Intermediate Lens (IML) that works as an aperture changer. The IML allows to use the optical system in different working/imaging modes and with unmatched magnification range (from about 2x).

Optimized Chamber Geometry
Microscopes in VEGA or MIRA series comes in several variants according to a chamber size (X, L, S) and with and according to requirements on stage movements, vacuum condtitions or other equipment.

Vacuum System
The vacuum system consists of powerfull rotary and turbomolecular pump as a standard. Obtaining of the working vacuum is quick.
There are two different vacuum modifications of the vacuum system of the SEM. A HiVac variant with high vacuum conditions inside a SEM chamber or a variable pressure (UniVac) variant with possibility to switch into a low vacuum mode easily. In this mode, the observation of non-conductive specimens in their natural (uncoated) is possible. Tescan patented true secondary electron detector LVSTD can be used.

Detectors and Accessories
Tescan provides microscopes with first class detectors, based on the YAG scintillation technology, for high quality imaging and in high imaging rates.