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High vacuum microscope with large chamber and 5 axes motorised stage
Strengths:
- Innovative and powerful four-lens Wide Field Optics™
- A great variety of working modes
- Fast and clean turbomolecular-pumped vacuum system - no water cooling required!
- A comprehensive suite of sophisticated, intuitive sotfware for microscope control, image archiving, measurements, processing and analysis
- Network operations, remote control and diagnostics
- 11 chamber interface ports and a comprehensive choice of detectors and accessories
- Optimized analytical geometry allowing simultaneous EDX, WDX or EBSD
- Accurate and reliable automated analyses utilizing fast and precise computer-controlled stage motorization, including motorised Z movement.
- Remote control of the microscope including stage movements control and possibility of remote diagnostics
- Wide choice of supplementary accessories
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The VEGA\\LSH
Essential Specifications:
| Resolution |
| In high vacuum mode (SE) |
3 nm at 30 kV |
| Working vacuum |
| High vacuum mode |
< 1x10-2 Pa |
| Electron optics working modes |
| Resolution, Depth, Field, Wide Field, Rocking beam |
| Magnification |
| 4x to 1 000 000x |
| Accelerating voltage |
| 200 V to 30 kV |
| Electron gun |
| Tungsten heated cathode |
| Probe current |
| 1 pA to 2 µA |
| Scanning |
| Scanning speed: |
From 160 ns to 10 ms per pixel adjustable in steps or continuously |
Focus window: |
Shape, size and position continuously adjustable |
| Dynamic Focus, Point & Line Scan | |
| Image size |
| Up to 8,192 x 8,192 pixels, adjustable separately for live image
(in 4 steps) and for stored images (9 steps), selectable square or 4:3 or 2:1 rectangle |
| Microscope control |
| All microscope functions are controlled by means of PC via the
VegaTC program using Windows™ platforms |
| Remote control |
| Via TCP/IP |
| Automatic procedures |
| Vacuum control, Filament heating, Gun Alignment, Centering of resolution mode, Compensation for kV, Probe
Current optimized for Spot Size, Spot Size optimized for Magnification, Scanning
Speed, Contrast & Brightness, Focus & Stigmator, Look up Table |
| Pumping after specimen exchange |
| typically < 3 minutes |
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Chamber Options:
| Type of chamber - LS |
Large chamber,
fully motorised compucentric stage |
| Chamber suspension |
| mechanic - by mean of rubber damping elements |
| Chamber LS |
| Internal diameter |
ø230 mm |
| Door width |
148 mm |
| Number of ports |
11 |
| Specimen stage |
| Type |
compucentric |
| Movements |
X= 40 mm - motorized
Y= 40 mm - motorized
Z= 47 mm - motorized
Rot.: 360° continuous - motorized
Tilt: -75° to +50°* - motorized
* from WD 15mm and for eucentric height of the specimen
| | Option: |
stage is upgradable to the following X×Y ranges: 40x60mm; 80x40mm; 80x60mm; 60x40mm; 60x60mm
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| Maximum specimen height: 60mm |
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Standard scope of delivery of the microscope VEGA\\LSH:
- SE detector
- Probe current measurement
- Touch alarm
- IR Chamber View Camera
- Software
- Measurement
- Image Operations
- Image Processing
- 3D Scanning
- Hardness
- Multi Image Calibrator
- Object Area
- Print magnification
- Switch-Off Timer
- Tolerance
Option:
- Fixed BSE detector
- Retractable BSE detector
- TE Detector
- CL Detector
- EBIC
- EDX*
- WDX*
- EBSD*
- Cooling stage with Peltier Couple
- Beam Blanker
- Software:
- Morphology
- Particle Analysis
- Image Observer
- Image Snapper
- MouseLink
* - fully integrated third party products
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