|
Variable pressure microscope with large chamber and 5 axes motorised stage
VEGA\\LMU is a fully PC controlled scanning electron microscope designed for high as well as low vacuum operating.
Strengths:
- possibility of examination of non-conducting, water containing specimens in their natural state at low vacuum conditions in microscope chamber
- quick and easy achievement of clean working vacuum by means of turbomolecular and rotary pumps, easy and fast switch from high vacuum to low vacuum working mode
- innovative and powerful electron optics with four lenses
- a great variety of working modes
- fast and clean turbomolecular-pumped vacuum system - no water cooling required!
- a comprehensive suite of sophisticated, intuitive sotfware for microscope control, image archiving, measurements, processing and analysis
- network operations, remote control and diagnostics
- 11 chamber interface ports and a comprehensive choice of detectors and accessories
- optimized analytical geometry allowing simultaneous EDX, WDX and EBSD
- accurate and reliable automated analyses utilizing fast and precise computer-controlled stage motorization, including motorised Z movement.
- remote control of the microscope including stage movements control and possibility of remote diagnostics
- wide choice of supplementary accessories
|
The VEGA\\LMU
Essential Specifications:
| Resolution |
| In high vacuum mode (SE) |
3 nm at 30 kV |
| In low, medium vacuum mode (BSE, LVSTD) |
3.5 nm at 30 kV |
| Working vacuum |
| High vacuum mode |
< 1x10-2 Pa |
| Medium vacuum mode |
3 – 150 Pa |
| Low vacuum mode |
3 – 500 Pa (optionally 2000 Pa)
|
| Electron optics working modes |
| High Vacuum |
Resolution, Depth, Field, Wide Field, Rocking beam |
| Medium Vacuum |
Resolution, Depth, Field, Wide Field |
| Low Vacuum |
Resolution, Depth |
| Magnification |
| 4x to 1 000 000x |
| Accelerating voltage |
| 200 V to 30 kV |
| Electron gun |
| Tungsten heated cathode |
| Probe current |
| 1 pA to 2 µA |
| Scanning |
| Scanning speed: |
From 160 ns to 10 ms per pixel adjustable in steps or continuously |
Focus window: |
Shape, size and position continuously adjustable |
| Dynamic Focus, Point & Line Scan, 3D Beam | |
| Image size |
| Up to 8,192 × 8,192 pixels, adjustable separately for live image
(in 4 steps) and for stored images (10 steps), selectable square or 4:3 or 2:1 rectangle |
| Microscope control |
| All microscope functions are controlled by means of PC via the
VegaTC program using Windows™ platforms |
| Remote control |
| Via TCP/IP |
| Automatic procedures |
| Vacuum control, Filament heating, Gun Alignment, Centering of Resolution mode, Compensation for kV, Probe
Current optimized for Spot Size, Spot Size optimized for Magnification, Scanning
Speed, Contrast & Brightness, Focus & Stigmator, Look up Table |
| Pumping after specimen exchange |
| typically < 3 minutes |
 |
|
|
Chamber Options:
| Type of chamber = LM |
Large chamber,
fully motorised compucentric stage |
| Chamber and column suspension |
| pneumatic or optional active vibration isolation |
| Chamber LM |
| Internal diameter |
ø230 mm |
| Door width |
148 mm |
| Number of ports |
11 |
| Specimen stage |
| Type |
compucentric |
| Movements |
X= 80 mm - motorised
Y= 60 mm - motorised
Z= 47 mm - motorised
Rot.: 360° continuous - motorised
Tilt: -75° to +50°* - motorized
from WD 15mm and for eucentric height of the specimen
|
| Maximum specimen height: 60mm |
|
|
Standard scope of delivery of the microscope VEGA\\LMU:
- SE detector
- Retractable BSE detector
- Probe current measurement
- Touch alarm
- Chamber view camera
- Software
- Measurement
- Image Operations
- Image Processing
- 3D Scanning
- Hardness
- Multi Image Calibrator
- Object Area
- Print magnification
- Switch-Off Timer
- Tolerance
Option:
- LVSTD
- TE detector
- CL Detector
- EBIC
- EDX*
- WDX*
- EBSD*
- Beam Blanker
- Cooling stage with Peltier Couple
- Software:
- Morphology
- Particle Analysis
- Image Observer
- Image Snapper
- MouseLink
* - fully integrated third party products
|
|
)