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Variable pressure microscope with small chamber and manual stage movements
VEGA\\SBU is fully PC controlled scanning electron microscope designed for high as well as low vacuum operations.
Strengths:
- possibility of examination of non-conducting, water containing specimens in their natural state at low vacuum conditions in microscope chamber
- quick and easy achievement of clean working vacuum by means of turbomolecular and rotary pumps,easy an fast switch from high vacuum to low vacuum working mode
- fully automated set-up of the microscope and many other automated procedures
- remote control of the microscope and possibility of remote diagnostics
- comprehensive and sophisticated Windows™ based software for microscope control and image capture, as well as image archiving, processing and analysis
- unique four-lens electron optical column
- favourable conditions for complex analysis of specimens
- wide choice of supplementary accessories
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The VEGA\\SBU
Essential Specifications:
| Resolution |
| In high vacuum mode (SE) |
3 nm at 30kV |
| In low, medium vacuum mode (BSE) |
3.5nm at 30kV |
| Working vacuum |
| High vacuum mode |
< 1×10-2 Pa |
| Medium vacuum mode |
3 – 150Pa |
| Low vacuum mode |
3 - 500Pa
(optionally 2000Pa) |
| Electron optics working modes |
| High vacuum mode |
Resolution, Depth, Field, Fish-eye, Rocking beam |
| Medium vacuum mode |
Resolution, /Depth, Field/, Fish-eye |
| Low vacuum mode |
Resolution |
| Magnification
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| At 30kV in Resolution mode
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24× to 1 000 000× |
| Min. magnification at Fish-eye mode |
about 4× |
| Accelerating voltage |
| 200 V to 30 kV |
| Electron gun |
| Tungsten heated cathode |
| Probe current |
| 1 pA to 2 µA |
| Scanning |
| Scanning speed: |
From 200 ns to 10 ms per pixel adjustable in steps or continuously |
Focus window: |
Shape, size and position continuously adjustable |
| Dynamic Focus, Point & Line Scan | |
| Image size |
| Up to 4 096 × 4 096 pixels, adjustable separately for live image
(in 4 steps) and for stored images (9 steps), selectable square, 4:3 or 2:1 rectangle |
| Microscope control |
| All microscope functions are controlled by means of PC via the
VegaTC program using Windows™ platforms |
| Remote control |
| Via TCP/IP |
| Automatic procedures |
| Vacuum control, Filament heating, Gun Alignment,Centering of Resolution mode, Compensation for kV, Probe
Current optimized for Spot Size, Spot Size optimized for Magnification, Scanning
Speed, Contrast & Brightness, Focus & Stigmator, Look up Table |
| Pumping after specimen exchange |
| typically < 3 minutes |
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Chamber Options:
| Type of chamber SB |
| Small chamber, manual eucentric stage |
| Chamber and column suspension |
| mechanic - by means of rubber dampening elements |
| Chamber |
| Internal size |
ø160 mm |
| Door width |
120 mm |
| Specimen stage |
| Type |
Eucentric |
| Movements |
X= 40 mm - manual
Y= 24 mm - manual
Z= 27 mm - manual
Z'= 6 mm - manual
Rot.: 360° continuous - manual
Tilt: -90° to +90° - eucentrically - manual |
| Maximum speciment height: 30mm |
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Standard scope of delivery of the microscope VEGA\\SBU:
- SE detector
- Probe current measurement
- Retractable BSE detector
- Touch alarm
- Software:
- Measurement
- Image Operations
- Image Processing
- 3D Scanning
- Hardness
- Multi Image Calibrator
- Object Area
- Print magnification
- Switch-Off Timer
- Tolerance
Option:
- Chamber view camera
- LVSTD
- BSE detector
- TE detector
- EBIC
- EDX*
- EBSD*
- Software:
- Morphology
- Image Observer
- MouseLink
* - fully integrated third party products
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