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Variable pressure microscope with extra large chamber and 5 axes motorized stage
VEGA\\XMU is fully PC controlled scanning electron microscope designate for high as well as low vacuum operating.
Strengths:
- possibility of examination of non-conducting, water containing specimens in their natural state at low vacuum conditions in microscope chamber
- quick and easy achievement of clean working vacuum by means of turbomolecular and rotary pumps,easy an fast switch from high vacuum to low vacuum working mode
- fast and precise movements of compucentric stage in all 5 axes with the possibility of stage position saving
- extra large chamber allowing easy and comfortable specimens manipulation
- fully automated set-up of the microscope and many other automated procedures
- remote control of the microscope including stage movements control and possibility of remote diagnostics
- comprehensive and sophisticated Windows™ based software for microscope control and image capture, as well as image archiving, processing and analysis
- unique four-lens electron optical column
- favourable conditions for complex analysis of specimens
- wide choice of supplementary accessories
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The VEGA\\XMU
Essential Specifications:
| Resolution |
| In high vacuum mode (SE) |
3 nm at 30 kV |
| In low, medium vacuum mode (BSE, LVSTD) |
3.5 nm at 30 kV |
| Working vacuum |
| High vacuum mode |
<1x10-2 Pa |
| Medium vacuum mode |
3 – 150 Pa |
| Low vacuum mode |
3 – 500 Pa (optionally 2000 Pa)
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| Electron optics working modes |
| High Vacuum |
Resolution, Depth, Field, Fish-eye, Rocking beam |
| Medium Vacuum |
Resolution , Depth , Field , Fish-eye |
| Low Vacuum |
Resolution |
| Magnification |
| At 30kV in Continual WideField Mode |
3x to 1 000 000x |
| Accelerating voltage |
| 200 V to 30 kV |
| Electron gun |
| Tungsten heated cathode |
| Probe current |
| 1 pA to 2 µA |
| Scanning |
| Scanning speed: |
From 200 ns to 10 ms per pixel adjustable in steps or continuously |
Focus window: |
Shape, size and position continuously adjustable |
| Dynamic Focus, Point & Line Scan | |
| Image size |
| Up to 4 096 x 4 096 pixels, adjustable separately for live image
(in 4 steps) and for stored images (9 steps), selectable square or 4:3 or 2:1 rectangle |
| Microscope control |
| All microscope functions are controlled by means of PC via the
VegaTC program using Windows™ platforms |
| Remote control |
| Via TCP/IP |
| Automatic procedures |
| Vacuum control, Filament heating, Gun Alignment, Centering of Resolution mode, Compensation for kV, Probe
Current optimized for Spot Size, Spot Size optimized for Magnification, Scanning
Speed, Contrast & Brightness, Focus & Stigmator, Look up Table |
| Pumping after specimen exchange |
| typically < 3 minutes |
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Chamber Options:
| Type of chamber = XM |
Extra large chamber,
motorized compucentric stage |
| Chamber and column suspension |
| pneumatic |
| Chamber |
| Internal size |
300 mm (width) x 330 mm (depth) |
| Door size |
280 mm(width) x 310 (height) |
| Specimen stage |
| Type |
Compucentric |
| Movements |
X= 130 mm - motorized
Y= 130 mm - motorized
Z= 100 mm - motorized
Rot.: 360° continuous - motorized
Tilt: -20° to +80° - motorized |
| Maximum specimen height: 143mm |
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Standard scope of delivery of the microscope VEGA\\XMU:
- SE detector
- Retractable BSE detector
- Probe current measurement
- Touch alarm
- Chamber view camera
- Software
- Measurement
- Image Operations
- Image Processing
- 3D Scanning
- Hardness
- Multi Image Calibrator
- Object Area
- Print magnification
- Switch-Off Timer
- Tolerance
Option:
- LVSTD
- TE detector
- EBIC
- EDX*
- WDX*
- EBSD*
- Cooling stage with Peltier Couple
- Software:
- Morphology
- Particle Analysis
- Image Observer
- Image Snapper
- MouseLink
* - fully integrated third party products
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