Scanning electron microscopes produced by Tescan are equipped with original electron-optical column with advanced technology of beam control. The Wide Field Optics™ technology opens up new advanced capabilities of the scanning electron microscopes.

Scanning Modes

The design of the column takes advantage of proprietary Intermediate Lens (IML), that works as an aperture changer. The capability of the IML allows scanning in different working/imaging modes - adapted to the following purposes:

• RESOLUTION mode - configures the column to produce the highest resolution for the chosen working conditions automatically.
• DEPTH mode - sets the column up in a mode, which enhances the depth of field.
• FIELD mode - optimises the column to provide a large field of view.
• WIDE FIELD mode - advanced mode for low magnification imaging with an extra large non-distorted field of view.
• ROCKING BEAM mode - scans one point by tilting the beam around it. The result for the (mono)crystalline materials is an Electron Channelling Pattern(ECP).

Advanced Scanning Features

Dynamic Focus

Complex control of the optical system allows continuous change of the working distance during scanning. Dynamic Focus therefore enables scanning in tilted plane or imaging of hardly accessible surfaces.

3D Beam - StereoSEM

The 3D Beam technology uses unique tilting of scanning's axis around the center of view field. This allows imaging from different sides/angles i.e. stereo imaging. Live stereoscopic view provides unique possibilities by manipulating with objects at micro and nanoscale.

Together with 3D reconstructioning software it is also possible to measure true profile or volume of the surface.

©Tescan, 2006
Wide Field Optics is a trademark of Tescan, s.r.o.