Steels & Metal Alloys
Ceramics and Hard Coatings
Polymers & Composites
Material for Building & Civil Engineering
Wood, Textile & Paper
Cell & Tissue morphology
Plant and Animal biology
Environmental and Food Sciences
Failure Analysis of Integrated Circuits
Ball Grid Array
Through Silicon Vias
Petrology & Mineralogy
Oil & Gas
MAIA3 model 2016
XEIA3 model 2016
GAIA3 model 2016
Q-PHASE: Quantitative, label-free imaging cytometry
TIMA-X TESCAN Integrated Mineral Analyser
TESCAN SEM/FIB-SEM with integrated Raman spectrometry
Beam Deceleration Technology
Electron Backscatter Diffraction
Low Vacuum Secondary Electron TESCAN Detector
Electron Beam Induced Current
Secondary Ion TESCAN Detector
Gas Injection System
Peltier cooling and heating stage
Optical stage navigation
Extended XM and GM chambers
How to estimate the resolution of a focused beam?
An easy way to estimate the resolution of a focused beam is by scanning over a sharp edge. The integral of the transmitted intensity of the Gaussian beam becomes a smooth step function (edge response). The resolution can be defined in terms of a height fraction (rise-distance) of the step function. Naturally, the choice of this fraction will significantly influence the value of the resolution.
What is a max positive voltage to be applied to a sample?
Max negative voltage to be applied to a sample: From 5 to 3 kV. If the accelerating voltage is 30kV, sample bias is 5kV and landing voltage (energy) is 25kV. That is the disposable maximum. For landing energy down to 1kV the sample bias is still 5kV. For the landing voltage below 1kV, that means down to 50V, the stage bias is linearly decreased to 3 kV. Only the experienced users are allowed to change sample bias down to 2.5 kV (such biasing can be used for cases when charging needs to be compensated).
Why FESEM gives better resolution than SEM?
The resolution of a SEM is basically given by the minimal spot size which can be formed and then rastered over your sample. This probe is formed by demagnifying the image of your gun. A field emission gun emits the electrons from a much smaller area then a therionic gun. Therefore the probe will principally be smaller for a FEG-instrument compared to a W- or a LaB6 instrument. Additionally the coherency is much higher, the energy spread smaller. This again allows to more perfectly focus the beam.
What is the maximum weight of the specimen?
TESCAN Specimen stage - maximum weight which can be loaded
SB - maximum weight 0.4kg
LM - maximum weight 1.0kg (without rotation)
XM=GM - maximum weight 8kg (without rotation)
Without rotation and tilt: 1kg
Without rotation: 0,3kg
With rotation and tilt: 0,3kg (center of gravity of the sample must be placed in the center of the manipulator)
Without rotation and tilt: 8kg
Without rotation: 4,5kg
With rotation and tilt: 1kg (center of gravity of the sample must be placed in the center of the manipulator)
Semiconductors & Microelectronics
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