An insight into the Triglav™ UHR SEM column

May/16/2017
Ultimate resolution and superb imaging at low beam energies
 
Charging of non-conductive materials, observation of very thin layers or surface at high magnification, damaging of sensitive samples – these are the problems which many scientists are faced when using scanning electron microscopy (SEM). High-resolution imaging, particularly at low accelerating voltages, has always been of great importance in a wide variety of fields, from technology and engineering to biology and scientific research. To satisfy the growing demands on low-voltage imaging while keeping outstanding resolution, TESCAN has developed the ultra-high resolution (UHR) Triglav™ SEM column equipped with the TriLens™ objective and an advanced detection system.

Documents for download

Triglav™ UHR column
Charging of non-conductive materials, observation of very thin layers or surface at high magnification, damaging of sensitive samples – these are the problems which many scientists are faced when using scanning electron microscopy (SEM). High-resolution imaging, particularly at low accelerating voltages, has always been of great importance in a wide variety of fields, from technology and engineering to biology and scientific research. To satisfy the growing demands on low-voltage imaging while keeping outstanding resolution, TESCAN has developed the ultra-high resolution (UHR) Triglav™ SEM column equipped with the TriLens™ objective and an advanced detection system.
pdf – 2.1 MB

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