Thin-film transistor display lamella preparation using Xe Plasma FIB

May/18/2017
Check out how to prepare high-quality large TEM lamellae
 
In this application note we describe and present the preparation process of a TEM specimen from a TFT display array on glass substrate. The lamella was prepared using the TESCAN UHR-SEM/plasma FIB XEIA3 microscope.

thin-ae.jpg
Bright field image clearly shows the structure of the ultra-thin layers of the display.


Documents for download

Thin-film transistor display lamella preparation using Xe Plasma FIB
In this application note we describe and present the preparation process of a TEM specimen from a TFT display array on glass substrate. The lamella was prepared using the TESCAN UHR-SEM/plasma FIB XEIA3 microscope.
pdf – 1.1 MB

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