MAIA3 model 2016

The MAIA3 model 2016 is an ultra-high resolution SEM with excellent imaging capabilities in the whole range of beam energies.
A versatile detection system and high spatial resolution allows the observation of even the finest surface details. This is an essential feature for comprehensive characterisation of nanomaterials, for observation of beam-sensitive samples common in the semiconductor industry and for comfortable imaging of non-conductive samples including uncoated biological specimens.

Key features

Triglav™ - newly designed UHR electron column

  • TriLens™ objective system: unique combination of three-lens objective and crossover-free beam path
  • Advanced detection system with multiple SE and BSE detectors
  • Triglav™ - Ultimate ultra-high resolution at low beam energy: 1 nm at 1 keV and 0.7 nm at 15 keV
  • EquiPower™ thermal power dissipation system for excellent electron column stability
  • Electron beam currents up to 400 nA and rapid beam energy changes
  • Optimised column geometry for accommodating large wafers up to 8”
  • Real-time In-Flight Beam Tracing™ for performance and beam optimization
  • Extended low-vacuum mode with chamber pressures up to 500 Pa for imaging non-conducting specimens
  • Triple BSE detection TriBE™ for angle-selective signal collection. The Mid-Angle BSE and In-Beam LE-BSE detectors are located inside the column and detect medium-angle and axial backscattered electrons, while the In-Chamber BSE Detector detects wide-angle electrons. Together, they deliver a variety of imaging contrasts and enable low-energy detection down to 200 eV.
  • Triple SE detection TriSE™ to capture SE signal optimally in all working modes. The In-Beam SE detector inside the column enables detection of electrons at very short working distances. SE detector for beam deceleration mode gives ultimate resolution in BDM. The In-Chamber SE detector delivers superb topographic contrast.
  • Beam Deceleration Technology (BDT) for excellent resolution at very low beam energies down to 50 eV (optional)
MAIA3 model 2016
MAIA3 model 2016

Product Brochure

MAIA3 model 2016 Brochure
MAIA” model …†•2016 - Newly designed ultra-high resolution electron column for superb imaging.

Download the brochure!
pdf – 4.7 MB