Decontaminator

A decontaminator device is an essential option for applications in which a low energy electron beam (< 5 keV) or the beam deceleration mode is used.
A low energy electron beam has higher reactivity with molecules containing carbon. This reaction creates dark layers of contamination on the specimen surface during imaging which interferes with the investigation since such deposited polymerized hydrocarbon layers cause a low secondary electron yield, and as a result, the image becomes darker. Furthermore, the contamination layer causes structural changes of the observed area. In order to avoid this unwanted effect, it is highly recommended to use the decontaminator device prior to sample investigation to clean different surfaces inside the chamber.
Decontaminator
Contamination layer originates from volatile hydrocarbon molecules present in the chamber before cleaning