Optical stage navigation

TESCAN SEMs offer advanced and fully automated optical stage navigation which makes orientation on a sample stage even easier than ever before.
A colour overview image of the stage with specimens is taken with CCTV which is mounted on the vacuum chamber of the microscope. The overview image is correlated with the SEM image. As a result, a macroscopic view of samples is kept during SEM imaging and the motorised sample stage can be moved to a desired position with just a click on the point of interest in the overview image. The area around this point is then projected in the SEM Scanning window at the current set magnification. See the example of SEM and CCTV overview images below. The area under examination is indicated with a small green circle in the CCTV image.


 


 
Optical stage navigation
Optical stage navigation