Detectors

TESCAN offers a wide range of proprietary and third-party detectors that can be integrated into our SEM and FIB-SEM systems to satisfy particular analytical needs in your research and applications. For this purpose, all microscopes are equipped with a large number of ports to support multi-detector configurations.  
Electrons in SEMs (as well as ions in dual beam FIB-SEMs) are accelerated at voltages in the range of a few eV to 30 keV. These charged particles impinge on the surface of the material interacting with uppermost surface layers and, as a result, a cascade of collisions (elastic and inelastic) takes place generating a variety of signals such as secondary electrons (SEs), backscattered electrons (BSEs), and photoemission in the form of X-rays and Cathodoluminescence (CL). In dual beam systems, the secondary ion (SI) signal can also be collected. Each of these signals is emitted as a result of diverse physical processes and from different penetration depths carrying valuable information of the sample.

Contact us

Stay in touch! Do not hesitate to contact us with any question
Contact us

Subscribe to our newsletter

Do you want to receive latest news from TESCAN? Please subscribe to our newsletter