TESCAN SEM/FIB-SEM with integrated Raman spectrometry

The fully-integrated correlative Raman imaging and scanning electron microscopy for comprehensive sample analysis is a novel correlative microscopy technique. Through Raman imaging and scanning electron microscopy ultra-structural surface properties can be linked to molecular compound information.
The combination of Raman spectrometry and SEM imaging techniques allows researchers to extend the analytical capabilities of SEMs. Raman imaging is a well-known spectroscopic method used for obtaining sample information about the spatial distribution of chemical and molecular composition. It can also be used to generate 2D and 3D images and depth profiles to visualise the distribution of the molecular compounds within a sample. Raman spectrometry is suitable not only for phase identification but can also help to characterise the state of the material under study. Some of the Raman bands shift as a result of stress applied to the material. The stress intensity can be quantified and visualised. Raman spectrometry is useful to assess crystallinity of solid materials based on the width of Raman bands. Further information can be also extracted by looking at the Raman band intensities. It corresponds either to quantity of the material or it can be related to the thickness of the specific layered material. This method for instance, allows for distinguishing areas formed by mono-, bi-, or multi-layered-graphene.
  • Quick and convenient switching between SEM and Raman measurement
  • Automated sample transfer from one measuring position to the other
  • Integrated software interface for user-friendly measurement control
  • Correlation of the measurement results and image overlay
  • No compromise in SEM and Raman imaging capabilities
  • Raman microscopy provides analysis of chemical compounds and material characteristics (stress, orientation, crystallinity).
  • Raman spectroscopy is a complementary method to EDX.
TESCAN SEM/FIB-SEM with integrated Raman spectrometry
TESCAN SEM with integrated Raman spectrometry