MIRA3 XM
High performance FE SEM
Modern Electron Optics
Automated Analysis
Sophisticated Control
A fully PC controlled FE-SEM – for high vacuum as well as for low vacuum operations. Outstanding optical properties, flicker-free digital image with super clarity. Sophisticated user-friendly software for microscope control and image capturing using Windows™ platform. Standard formats of stored images, easy image management, processing and measurements, automatic set up of the microscope and many other automated operations are characteristic features of the equipment.
Analytical Potential
- XM MIRA chamber provide superior specimen handling using a full 5-axis motorized compucentric stage and ideal geometry for EDX and EBSD
- Numerous interface ports with optimized analytical geometry for EDX, WDX and EBSD as well as for attaching many other detectors
- First-class YAG scintillator-based detectors
- Selection of optional detectors and accessories
- Full operating vacuum can be obtained quickly and easily with powerful turbomolecular and dry fore vacuum pumps, electron gun pumping with an ion pump
- Investigation of non-conductive samples in variable pressure mode versions, excellent results in the investigation of magnetic samples
- Several options for chamber suspension type ensure effective reduction of ambient vibrations in the laboratory
MIRA3 Configurations
MIRA3 XMH
A high vacuum model is suitable for a wide range of applications where extra large conductive samples are investigated.
MIRA3 XMU
A variable pressure variant that supplements all the advantages of the high vacuum model with extended facility for low vacuum operations. This allows investigation of non-conductive materials in their natural uncoated state.
Microscope Control
All microscope functions are controlled by keyboard, mouse and trackball via the program MiraTC using Windows™ platform.
Standard:
- Measurement
- Image Processing
- 3D Scanning
- Hardness
- Multi Image Calibrator
- Object Area
- Switch-Off Timer
- Tolerance
- Scriptor
- Positioner
- Live Video
- EasySEM™
Optional:
- Particles Basic
- Particles Advanced
- Sample Observer
- Image Snapper
- DrawBeam Basic
- DrawBeam Advanced
- EasyEDX Integration Software
- Input Director
- TESCAN TRACE GSR
- 3D Metrology (MeX)
- System Examinertions
Electron Optics:
| Electron Gun: | High brightness Schottky emitter | ||||||||||||||
| Resolution: |
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| Magnification: | at 30kV: 1x– 1,000,000x | ||||||||||||||
| Maximum Field of View: | 6.4 mm at WDanalytical 10 mm | ||||||||||||||
| Accelerating Voltage: | 200 V to 30 kV / 50 V to 30 kV with BDT option | ||||||||||||||
| Probe Current: | 2 pA to 200 nA | ||||||||||||||
| Electron Optics Working Modes: |
Available modes in low vacuum are Resolution and Depth. |
Scanning:
| Scanning Speed: | From 20 ns to 10 ms per pixel adjustable in steps or continuously |
| Scanning Features: | Point & Line Scan |
Vacuum System:
| Chamber Vacuum: |
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| Gun Vacuum: | < 3x10-7 Pa | ||||
| Pumping Time after Specimen Exchange: | typically < 3.5 minutes |
* pressure < 5x10-4 Pa reachable
** with low vacuum aperture inserted
Chamber:
| Internal diameter: | 285 mm (width) x 340 mm (depth) | ||||
| Door: | 285 mm (width) x 320 mm (height) | ||||
| Number of ports: | 12+ + configuration and number of ports can be modified to customer´s needs | ||||
| Chamber Suspension: |
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Specimen Stage:
| Type: | Compucentric, fully motorized |
| Movements: | X = 130 mm (–50 mm to +80 mm) Rotation: 360° continuous Note: Range of the movements can be dependent on WD and configuration. |
| Maximum Specimen Height: | 98 mm (with BDT rotation stage) |
| Chamber and stage optional: | Extended chamber |
| Extended chamber with modified Y-movement |
Standard:
- SE Secondary electron detector Everhart-Thornley type (YAG Crystal)
- Retractable BSE* Retractable annular backscattered electron detector scintillator type (YAG crystal) with high sensitivity and atomic number resolution (0.1)
- pA Meter Probe Current Measurements
- Touch Alarm Stops movements when sample touches any part of the chamber
- IR TV Camera For live „Chamber View“
Optional1:
- In-Beam SE Detector
- Detector of secondary electrons located in the objective and intended for high resolution and short working distances
- LVSTD (up to 500 Pa)
- Original SE detector for low vacuum operations, modified Everhart-Thornley type, U.S. Patent No. 7,193,222 B2
- Beam Deceleration Technology (BDT) package
- Intended for the highest resolution at low beam voltages includes system for negative voltage biasing of the sample stage and new in-beam detector that works either as SE detector (in BD mode) or BSE detector (in standard mode). BDT package includes decontaminator as standard.
- Beam Deceleration Technology (BDT) option
- Intended for the highest resolution at low beam voltages includes system for negative voltage biasing of the sample stage and new in-beam detector that works either as SE detector (in BD mode) or BSE detector (in standardl mode). This option does not include decontaminator.
- In-Beam BSE detector
- Annular scintillator based backscattered electron detector (YAG crystal) mounted in-column that enables to obtain BSE images at very short working distances
- Retractable Dual Scintillator BSE Detector*
- Retractable 4-Quadrant semiconductor BSE Detector*
- STEM detector Scanning transmission electron microscope detector; Bright Field and Dark Field imaging
- CL Detector* Panchromatic cathodoluminescence detector, two wavelength ranges available: 350 nm – 650 nm; 185 nm – 850 nm
- Color CL Detector* Color cathodoluminescence detector. RGB image processing is fully integrated in microscope control software. No external scanning, wavelength range 350 nm – 850 nm.
- BSE/CL detector Combined retractable, 350 nm – 650 nm
- EBIC Electron beam induced current detection
- EasyEDX Integrated tool for Bruker EDS control
- EDX** Take off angle: 35° at WD 15 mm; 30° at WD 10 mm
- WDX**,*** Take off angle: 35 at WD 15 mm; 30° at WD 10 mm
- EBSD** Electron backscattered diffraction
*motorized mechanics as an option
** fully integrated third party products
*** EDAX only in configuration with In-Beam detector
Optional Accessories1:
- Peltier Cooling stage
- Water Vapor Inlet
- Beam Blanker
- Load Lock
- Control Panel
- Optical Stage Navigation
- Nanomanipulators
- Decontaminator/plasma cleaner
1Possible combinations of optional detectors and other accessories must be discussed with TESCAN Brno.
UPS 2kW is standard part of delivery
|
 Carbide |
 Mold |
 Mites (Acarina) |
 Proximity Correction |
 Fluorite |
 Sandstone |
 Zoned quartz grains |
 Nonwoven Textile |
 Anthoceros agrestis Paton |
 Phaeoceros carolinianus |
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