VEGA3 LM

TESCAN

A fully PC controlled SEM with conventional tungsten heated cathode intended both for high vacuum as well as for low vacuum operations. Outstanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for microscope control and image capturing using Windows™ platform, standard formats of stored images, easy image management, processing and measurements, automatic setup of the microscope and many other automated operations are among the characteristic features of the equipment. 

Analytical Potential:

  • The LM chamber label indicates a large analytical chambere with a fully 5-axis motorized stage
  • 11 chamber interface ports with optimized analytical geometry for EDX, WDX and EBSD
  • First-class YAG scintillator based detectors
  • Selection of optional detectors and accessories
  • Full operating vacuum can be reached within a few minutes with powerful turbomolecular and rotary fore vacuum pumps
  • Investigation of non-conductive samples in the variable pressure mode (LMU) version
  • Several options of chamber suspension type ensure effective reduction of ambient vibrations in the laboratory
  • 3D measurements on a reconstructed surface utilizing 3D metrology software

VEGA3 Configurations

VEGA3 LMH
A large chamber model with extended motorized manipulator operating at high vacuum suitable for wide range of applications where conductive materials are investigated.

VEGA3 LMU
A variable pressure SEM that supplements all the advantages of the high vacuum model with an extended facility for low-vacuum operations, enabling the investigation of non-conductive specimens in their natural, uncoated state.

Software extensions:

Standard:

  • Analysis & Measurement
  • Histogram
  • Image Processing
  • 3D Scanning
  • Hardness
  • Multi Image Calibrator
  • Object Area
  • Switch-Off Timer
  • Tolerance
  • X-Positioner
  • Live Video
  • EasySEMTM 

Optional:

  • Particles Basic
  • Particles Advanced
  • Sample Observer
  • Image Snapper
  • DrawBeam Basic
  • DrawBeam Advanced
  • EasyEDX Integration Software
  • Input Director
  • TESCAN TRACE GSR
  • 3D Metrology (MeX)
  • System Examiner
  • Cell Counter
  • Coral (Correlative microscopy module for Life Sciences)
  • SYNOPSYS Client (Correlative microscopy module for semiconductor applications) 

Electron Optics:

Electron Gun:

Tungsten heated cathode / optionally LaB6

Resolution:
High Vacuum Mode (SE): 3 nm at 30 kV / 2 nm at 30 kV
8 nm at 3 kV / 5 nm at 3 kV
Low Vacuum Mode (BSE, LVSTD): 3.5 nm at 30 kV / 2.5 nm at 30 kV
Magnification:

2x – 1,000,000x
(for 5’’ image width in Continual Wide Field/Resolution)

Maximum Field of View:

24 mm at WD 30 mm

Accelerating Voltage:

200 V to 30 kV

Probe Current:

1 pA to 2 µA

Electron Optics Working Modes:
Resolution: High-resolution mode
Depth: Sets the column up in a mode that enhances depth of focus
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging
Channeling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channeling pattern (ECP)

Available modes in low vacuum are Resolution and Depth.

Scanning:

Scanning Speed:

From 20 ns to 10 ms per pixel adjustable in steps or continuously

Scanning Features:

Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane or folded plane tilted up to ±70 deg
Image rotation, Image shift, Tilt compensation
3D Beam –defined tilting scanning axis around XY axis
Live Stereoscopic Imaging
Other scanning shapes available through the optional DrawBeam software

Vacuum System:

Chamber Vacuum:
High Vacuum Mode: < 9x10-3 Pa* (with Tungsten heated cathode/LaB6)
Medium Vacuum Mode: 3 – 150 Pa (with Tungsten heated cathode)
Low Vacuum Mode: 3 – 500 Pa** (with Tungsten heated cathode/LaB6)
Optional: 3 – 2000 Pa** (with Tungsten heated cathode/LaB6)
Gun Vacuum:

for LaB6: < 3x10-5 Pa

Column Vacuum:

< 9x10-3 Pa*

Pumping Time after Specimen Exchange:
High Vacuum Mode: typically < 3,5 minutes
Medium Vacuum Mode: typically < 3 minutes
Low Vacuum Mode: typically < 3 minutes

* pressure < 510-4 Pa reachable, optional vacuum gauge needed (on request)

** with low vacuum aperture inserted

Chamber:

Number of ports:

11+

+ configuration and number of ports can be modified to customer’s needs

Chamber Suspension:
Standard: Pneumatic
Optional: Mechanic (rubber elements) – not available with LaB6 option
Active vibration isolation (integrated)

Specimen Stage:

Type:

Compucentric, fully motorized

Movements:

X = 80 mm (–40 mm to +40 mm)
Y = 60 mm (–30 mm to +30 mm)
Z = 47 mm

Rotation: 360° continuous
Tilt: –80° to +80° (WD and sample size dependent)

Standard:

  • SE - secondary electron detector Everhart-Thornley type (YAG Crystal)
  • Retractable BSE* - retractable annular backscattered electron detector scintillator type (YAG crystal) with high sensitivity and atomic number resolution (0.1)1
  • pA Meter - Probe Current Measurements
  • Touch Alarm stops movements when sample touches any part of the chamber
  • IR TV Camera for live „Chamber View“

1 Standard for LMU, for LMH optional

Optional2:

  • LVSTD (up to 500 Pa) - original SE detector for low vacuum operations, modified Everhart-Thornley type, U.S. Patent No. 7,193,222 B2, LMU only
  • LVSTD (up to 1000 Pa) – N2 conditions, LMU only
  • LVSTD (up to 1000 Pa) – water vapor/N2 conditions, LMU only
  • Fixed BSE - annular scintillator type (YAG Crystal) with high sensitivity and atomic number resolution (0.1); non-retractable
  • Retractable Dual Scintillator BSE Detector*
  • Retractable 4-Quadrant semiconductor BSE Detector*
  • STEM detector - scanning transmission electron microscope detector; Bright Field and Dark Field imaging
  • R-STEM - motorized retractable version of STEM detector with standard TEM grids holder  
  • CL Detector* - panchromatic cathodoluminescence detector, two wavelength ranges available: 350 nm – 650 nm; 185 nm – 850 nm
  • Rainbow CL Detector* - retractable color as well as panchromatic cathodoluminescence detection in separate channels. RGB image processing is fully integrated in microscope control software; no external scanning, wavelength range 350 nm – 850 nm
  • Al-coated BSE* - specially designed BSE detector for simultaneous CL and BSE detection
  • Compact CL - modified CL detector specially designed for simultaneous CL and BSE  detection 
  • Rainbow CL (Compact) - modified Rainbow CL detector specially designed for simultaneous CL and BSE detection
  • BSE/CL detector - combined retractable, 350 nm – 650 nm
  • EBIC - electron beam induced current detection
  • EasyEDX - super-integrated O.E.M. EDX microanalyser
  • EDX** - take off angle: 35° at WD 15 mm; 30° at WD 10 mm
  • WDX** - take off angle: 35 at WD 15 mm; 30° at WD 10 mm
  • EBSD** - electron backscattered diffraction

* motorized mechanics as an option
** fully integrated third party products

Optional Accessories2:

  • Peltier Cooling stage
  • Beam Blanker
  • Water Vapor Inlet
  • Load Lock
  • Control Panel
  • Optical Stage Navigation
  • Nanomanipulators

2 Possible combinations of optional detectors and other accessories must be discussed with TESCAN Brno.

VEGA3 LM

VEGA3 LM 

VEGA3 LM

VEGA3 LM 

VEGA3 LM

VEGA3 LM 

VEGA3 LM

VEGA3 LM 

VEGA3 LM

VEGA3 LM 

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