VELA3 XM
High performance FE SEM
Modern Electron Optics
Automated Analysis
Sophisticated Control
A fully PC controlled SEM with conventional tungsten heated cathode in combination with gallium Focused Ion Beam (FIB) column and optionally with Gas Injection System (GIS). Outstanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for SEM/FIB/GIS control and image capturing using Windows™ platform, standard formats of stored images, easy image management, processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the equipment.
Analytical Potential
- XM chamber model provides superior specimen handling using a full 5-axis motorized compucentric stage and ideal geometry for EDX and EBSD
- Option of extra-large XM chamber with robust stage able to accommodate large samples
- Numerous interface ports with optimized analytical geometry for EDX, WDX and EBSD as well as for attaching many other detectors
- First-class YAG scintillator-based detectors
- Selection of optional detectors and accessories
- Full operating vacuum can be obtained quickly and easily
- Investigation of non-conductive samples in variable pressure mode versions, favorable conditions for the investigation of magnetic samples, non-distorted EBSD pattern compared to immersion magnetic lenses
- Integrated active vibration isolation ensures effective reduction of ambient vibrations in the laboratory
VELA3 Configurations
The XM configurations extend their analytical capabilities, providing the capability to perform fine sample surface observation and modification even with extra-large specimens.
VELA3 XMH
These extra-large chamber models with compucentric motorized manipulators operate at high vacuum for the investigation of conductive samples with extraordinary imaging quality.
VELA3 XMU
These variable pressure SEM models supplement all the advantages of the high-vacuum model with an extended facility for low-vacuum operations, enabling the investigation of non-conductive specimens in their natural uncoated state.
Standard:
- Measurement
- Image Processing
- 3D Scanning
- Hardness
- Multi Image Calibrator
- Object Area
- Switch-Off Timer
- Tolerance
- Scriptor
- Positioner
- Live Video
- DrawBeam Basic
- EasySEMTM
Optional:
- Particles Basic
- Particles Advanced
- Sample Observer
- Image Snapper
- DrawBeam Advanced
- Input Director
- TESCAN TRACE GSR
- 3D Metrology (MeX)
- 3D Tomography
- System Examiner
Electron Optics:
| Electron Gun: | Tungsten heated cathode | ||||||||||
| Resolution: |
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| Magnification: | 1.5x – 1,000,000x | ||||||||||
| Maximum Field of View: | 90 mm | ||||||||||
| Accelerating Voltage: | 200 V to 30 kV | ||||||||||
| Probe Current: | 1 pA to 2 µA | ||||||||||
| Electron Optics Working Modes: |
Available modes in low vacuum are Resolution and Depth. |
Scanning:
| Scanning Speed: | From 20 ns to 10 ms per pixel adjustable in steps or continuously |
| Scanning Features: | Point & Line Scan |
Ion Optics:
| Ion column: | Canion / Cobra |
| Resolution: | <5 nm at 30 kV / <2.5 nm at 30 kV |
| Magnification: | minimum 150x at coincidence point and 10 kV (corresponding to 1 mm view field), maximum 1,000,000x |
| Accelerating Voltage: | 0.5 kV to 30 kV |
| Ion Gun: | Ga Liquid Metal Ion Source |
| Probe Current: | 1 pA to 40 nA / 1 pA to 50 nA |
| SEM-FIB Coincidence at: | WD 9 mm for SEM - WD 12 mm for FIB |
| SEM-FIB angle: | 55° |
Vacuum System:
| Chamber Vacuum: |
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| Gun Vacuum: | |||||||||
| Column Vacuum: | < 9x10-3 Pa* | ||||||||
| FIB gun Vacuum: | < 5x10-6 Pa | ||||||||
| Pumping Time after Specimen Exchange: | typically < 3.5 minutes |
* pressure < 5x10-4 Pa reachable, optional vacuum gauge needed (on request)
** with low vacuum aperture inserted
Chamber:
| Internal diameter: | 285 mm (width) x 340 mm (depth) | ||||
| Door: | 285 mm (width) x 320 mm (height) | ||||
| Number of ports: | 12+ + configuration and number of ports can be modified to customer’s needs | ||||
| Chamber Suspension: |
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Specimen Stage:
| Type: | Compucentric, fully motorized |
| Movements: | X = 130 mm (–50 mm to +80 mm) Rotation: 360° continuous Note: Range of the movements can be dependent on WD and configuration. |
| Maximum Specimen Height: | 145 mm (without rotation stage) |
| Chamber and stage optional: | Extended chamber |
| Extended chamber with modified Y-movement |
Standard:
- SE Secondary electron detector Everhart-Thornley type (YAG Crystal)
- Retractable BSE* Retractable annular backscattered electron detector scintillator type (YAG crystal) with high sensitivity and atomic number resolution (0.1)
- pA Meter Probe Current Measurements
- Touch Alarm Stops movements when sample touches any part of the chamber
- IR TV Camera For live „Chamber View“
Optional1:
- LVSTD (up to 500 Pa)
- Original SE detector for low vacuum operations, modified Everhart-Thornley type, U.S. Patent No. 7,193,222 B2
- SITD Secondary Ion TESCAN Detector; possible simultaneous SE and SI acquisition
- Retractable Dual Scintillator BSE Detector*
- Retractable 4-Quadrant semiconductor BSE Detector*
- STEM Detector Transmitted electrons detector; Bright Field and Dark Field imaging
- CL Detector* Panchromatic cathodoluminescence detector, two wavelength ranges available: 350 nm – 650 nm; 185 nm – 850 nm
- Color CL Detector* Color cathodoluminescence detector. RGB image processing is fully integrated in microscope control software; No external scanning, wavelength range 350 nm – 850 nm
- EBIC Electron beam induced current detection
- SPM Scanning probe microscope (AFM or STM modes), easy to install on the SEM stage, simultaneous SPM/SEM work possible
- EDX** Take off angle: 25° at SEM WD 9 (coincidence point)
- WDX** Take off angle: 35° at SEM WD 9 (coincidence point)
- EBSD** Electron backscattered diffraction, ideally positioned to work at SEM WD 9 (coincidence point)
* motorized mechanics as an option
** fully integrated third party products
Optional Accessories1:
- Peltier Cooling stage
- Beam Blanker
- Load Lock
- Control Panel
- Optical Stage Navigation
- Nanomanipulators
1Possible combinations of optional detectors and other accessories must be discussed with TESCAN Brno.
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