The LYRA I is a favorable combination of the electron and ion sources and optical columns attached on one chamber. It extends imaging qualities of the scanning electron microscope with the possibility of surface modification by a focused ion beam.
Performance in Nanospace
The LYRA belongs to a new generation of instrumentation that opens a possibility to study materials and their properties directly at micro and sub-microscale. 
The LYRA I Family
LYRA I FIB-SEM
The LYRA I basic configuration is based on VEGA electron column with a tungsten heated electron gun. The LYRA I exists in high vacuum variant as LYRA I XMH and a variable pressure model as LYRA I XMU.LYRA I FEG
The LYRA I FEG is a favorable combination for demanding users. It is based on a high resolution MIRA FE-SEM column with a Schottky field emission gun.
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We are constantly improving the performance of our products, so all specifications are subject to change without notice.
Product focus
Tescan introduces a new SEM Control Panel as another option to the standard controlers like multipurpose trackball or EasySEM™ touch screen control interface. more>>>
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