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Workshop on Theory and Applications of TESCAN Plasma FIB

In this workshop, we will present theory and show applications of plasma FIB usage. The technology used for a Xe+ ion plasma source focused ion beam system (PFIB) will be described and its advantages over Ga+ ion FIB for large volume analysis due to its inherently larger probe currents will be presented. PFIB allows the possibility to study larger volume helping to reveal material distribution, obtain better statistical information, and link the microscale to the nanoscale sample characterization. Combining a PFIB with a hybrid electromagnetic/electrostatic lens scanning electron microscope (SEM) enables high-resolution imaging of PFIB sections at all magnifications. We will show how easy it is to align the ion beam at various beam currents, mill, image, and deposit using the PFIB, show 2D cross-sections, and how to set up for 3D tomography acquisition. Unique to TESCAN is the use of either the TRUE-X masking method and/or a rocking stage, to eliminate curtaining artifacts inherent to large ion beams, and these features will be demonstrated. In addition, the inert Xe+ ions yield less implantation damage due to its larger ion mass, capable of producing high-quality S/TEM specimens as will be demonstrated.  We will also show some unique analytical capabilities including FIB/SIMS, as well as cryogenic applications with PFIB. The workshop will provide networking with TESCAN product and applications team and customers to optimize the workshop experience. 

The workshop will take place at the following address: 
University of Pennsylvania
Singh Center for Nanotechnology
Room: Glandt Forum
3205 Walnut Street
Philadelphia, PA 19104, United States

Your Workshop Hosts

Agenda & Registration

You can attend this workshop either IN-PERSON or ONLINE, please check the agenda below and decide for one of the options. You will find the registration form in each of the tabs “IN-PERSON” or “ONLINE”. Please note that the ONLINE variant of the workshop will not allow for participation (no open line for questions).