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TESCAN VEGA3

High throughput analytical W-SEM for materials characterization at a micro scale

  • SEM analysis and industrial inspection of materials at micro-scale
  • High-quality images can be obtained after minimum training
  • Fast setup of the electron beam – optimal imaging conditions are guaranteed by the In-Flight Beam Tracing
  • Intuitive live SEM navigation on the sample at magnification as low as 2× without the need of extra optical navigation camera thanks to the Wide Field Optics™ design
  • DEPTH imaging mode for highly-topographic samples, fibers, or fractured surfaces
  • Tool for correlative navigation always available as a standard feature
  • UniVac option for observation of charging and beam-sensitive samples
  • High performance at attractive cost of ownership
  • Product brochure

    TESCAN VEGA3

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