EDS and EBSD on the FIB-SEM workstation workshop

Tescan and EDAX teams organised a workshop on 3D EDS and EBSD at the University of Maryland on Wednesday, March 1.
The workshop covered milling with both gallium and Xe plasma focused ion beam microscopes. The use of energy dispersive spectroscopy and electron backscatter diffraction was demonstrated for 3D volume, mapping, imaging and reconstruction.
University of Maryland has a GAIA3 and XEIA3 on campus.