Electron Beam Induced Current

Electron Beam Induced Current (EBIC) is a SEM-based mapping and non-destructive fault isolation technique widely used for the examination of specific parts in integrated circuits and the precise localisation of defects in semiconductors.
EBIC provides good spatial and lateral depth resolution which is controlled by the SEM accelerating voltage. The inelastic interactions between the electron beam and the semiconductor sample result in the generation of electron-hole pairs which are separated by an internal field near the P-N junctions. The resulting current (EBIC) is imaged as the focused electron beam scans across the semiconductor device. The image contrast visualises defects of the device as dark areas while areas free of defects appear bright. This image provides the qualitative assessment of subsurface electrical and physical properties within the semiconductor with the resolution of secondary electron imaging. An EBIC analysis is also very useful in isolating electrical shorts through several layers of metallisation.

All TESCAN FIB-SEM systems can be equipped with an EBIC detector for failure analysis in semiconductor junctions. This detector enables measurement in two ranges of bias and three ranges of current measurement. The probing is performed by integrated nanomanipulators and, the signal from an EBIC detector can be used for fast signal mapping or locally measured in the SEM scanning window. Overlaying EBIC mapping on SEM images is also possible. The TESCAN EBIC detector can also be used as an absorbed electron current detector which allows the visualisation of the structure under the surface of integrated circuits. This assists in the localisation of defects such as short and open circuits. The interface of the detector is available for the comprehensive control of measured parameters and the graph window for quantitative EBIC profile, and current time response or current-voltage characteristic measurements. The EBIC technique can also be combined with FIB tomography resulting in a 3D map of EBIC activity.

Electron Beam Induced Current
EBIC image from a circuit
Todas as imagens desta galeria foram obtidas em colaboração com M. Golda da Universidade de Tecnologia de Brno.