FESEM image of AFM tip apex
NuNano Ltd and TESCAN recently announced the successful installation of a TESCAN Field Emission Scanning Electron Microscope (FESEM) at NuNano’s Bristol facility, where it will be used for 100-per cent automated quality control on atomic force microscope (AFM) probes with some of the tightest dimensional tolerances available today. NuNano has created software algorithms that enable them to automate FESEM imaging and acquire high-resolution images of the tip apex for every probe on a wafer―that‘s 400 probes per wafer―to achieve 100-per cent tip inspection.
Read the press release here.