TESCAN AutoSlicer™ user interface is designed for intuitive definition of sample preparation parameters, with user guidance available throughout the entire sample preparation process — up to attachment of the lamella to the TEM grid.
Silicon sample, 10 × 10 array of lamellae, all with the undercut step completed, prepared using an unattended, automated process. Preparation time was 8 hours with greater than 96% success rate.
Example of a sample after automated trenching and undercut, ready for in-situ inverted geometry lift-out. With TESCAN AutoSlicer™ handling the automated milling and deposition process, the user need only adjust the exact sample position for final thinning.
Key Benefits
Prepare high quality, ultra-thin TEM samples from sub-10 nm semiconductor technology nodes in less than one hour using advanced dedicated workflows provided by optimized TESCAN Ga FIB-SEM platform
Improve sample preparation throughput with fully automated TEM lamella preparation to the undercut in the trench followed by a guided workflow for semiautomated attachment of the lamella to the TEM grid
Retain flexibility for advanced TEM lamella preparation thanks to our nanomanipulator in the “below FIB” position, which allows preparation of top-down, planar and inverted lamella geometries without need of a flipping device
Obtain robust, predictable results on large variety of samples using adjustable reference marks that best suit the sample and its structure
Develop custom workflows unique to the samples processed in your lab. User-defined parameters for the automated TEM sample and crosssection preparation can be saved as guided workflows to help assure all samples meet the quality requirements for the type of analysis
Perform multi-site, unattended TEM sample preparation from multiple areas of interest with TESCAN AutoSlicer`s option to specify an array of lamellae at different locations and from multiple samples, preparing all samples in a single batch operation
TESCAN AutoSlicer™ is compatible with all TESCAN Ga and Plasma FIB-SEM instruments
Applications:
Prepare ultra-thin TEM lamellae, with the minimum amorphous damage from 10 nm FinFET devices
High-throughput cross-sectioning, analysis and sample preparation for logic, memory, RF/power compound semiconductors (GaN/SiC) and many other types of semiconductor devices
