To further improve the process of high current milling, TESCAN has developed a Rocking Stage for TESCAN’s Plasma FIB instruments. The TESCAN Rocking Stage is fully compatible with TESCAN hardware and software to create an integrated solution for more efficient workflow execution. Among the new capabilities of the TESCAN Rocking Stage is Y-axis tilt perpendicular to main stage X-axis tilt, and real-time SEM monitoring of the milling process.
Rocking stage technology is the most efficient method for improving surface quality and mitigating curtaining artifacts that can result from the use of higher beam currents. As an integrated component in TESCAN Plasma FIB instruments, our new Rocking Stage will further improve milling speed and accuracy to contribute to an overall faster time to data.
Read more about the new TESCAN Rocking Stage – Press Release.