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With the similarities in today’s UHR-SEM resolution performance specifications, the criteria for evaluating UHR-SEM capabilities, slowly but surely, are placing more emphasis on the ability to use multiple diverse contrast methods to reveal information that is not visible with resolution alone.
In general, when energy is transferred to the specimen by the primary beam, the sample generates a range of useful signals that are exploited to characterize the material. One of the principal signals generated by the sample, the backscattered electron (BSE) signal, originates at a range of angles and emitted energies from different depths below the sample’s surface. Thus, the angular and energy-selectivity characteristics of the BSE signal are considered secondary backscattered electron contrast methods. It is evident that having the ability to acquire the BSE signal selectively brings with it the potential to enhance the information that a backscattered electron image reveals.
In this webinar, learn how TESCAN CLARA UHR-SEM is tackling the requirement for differentiated contrast methods by implementing a comprehensive choice of backscattered electron detectors, including chamber-mounted segmented solid-state or scintillator backscattered electron detectors, an on-axis in-column detector, and the proprietary in-column Multidetector™.
Presenter: Petr Klimek
About Petr Klimek
Petr Klímek is a Product Manager for TESCAN SEMs at the TESCAN in Brno, Czech Republic. He has 5 years of experience with SEMs and their application to routine microanalytical tasks. He obtained his Ph.D. in Materials Sciences at Mendel University in Brno and extended his materials research background through his internships at Fraunhofer WKI and Oregon State University (Fulbright Scholar).