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TESCAN SOLARIS

An alternative solution for semi-automated high-quality TEM lamella preparation

  • Low-kV ultra-high-resolution imaging of high-end semiconductor devices
  • Precise end-pointing at low electron beam energies
  • Gentle FIB thinning for improved quality results in TEM sample preparation enabled by excellent low-kV ion beam performance
  • Optimized workflows and recipes for easy preparation of ultra-thin TEM lamellae

  • Semi-automated software module for site-specific TEM lamella preparation
  • Preparation of advanced geometry TEM lamellae from the most advanced semiconductor nodes
  • Specialized, load-lock-compatible stage carousel for TEM sample preparation
  • Dedicated TEM grid holders with fully optimized geometry for advanced TEM sample preparation
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Do you wish to discuss TESCAN SOLARIS? Contact our Team directly!