SiAlON ceramics are known for their superior mechanical properties, thermal stability, creep resistance and corrosion resistance. Such properties make these ceramics suitable for a variety of applications. Thermal conductivity of SiAlON ceramics could be further improved by using graphene additive. It is then important to properly characterise these compounds (SiAlON-graphene) in order to control and obtain the desired properties. FIB-SEM tomography is a suitable analytical technique that provides unique 3D structural information at microscale with nanoscale resolution. The new TESCAN S9000X is a FIB-SEM analytical platform that combines the next generation Triglav™ UHR SEM column with the new iFIB+™ Xe plasma FIB column. The S9000X has it all what it takes to be ideal for ultra-fast large-scale FIB-SEM tomography with high-spatial resolution and excellent contrast.
Download the new TESCAN Application Example and find out more information.
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- Overview of a 1086 μm-wide cross-section in an OLED display, FoV 1.26 mm.
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- Detailed image of the cross-section of the OLED display showing Al contacts and SiO2/SiNx layer structure imaged with the Mid-Angle BSE detector at 2 keV.
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- Detail of under-bump metal layers using different detectors for different type of contrasts. In-Beam SE for topographic contrast.
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- Detail of under-bump metal layers using different detectors for different type of contrasts. In-Beam f-BSE for combined material and topographic contrast.
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- 630 μm-diameter solder ball cross-sectioned using a Si mask for artefact-free surface.
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- Detail view of the SiAlON-graphene sample which gives precise information about phase distribution. Analysed volume: 22 × 22.3 × 66.9 μm³.
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- STEM-BF image of an 80 nm-thick TEM specimen from a DRAM 65 nm node prepared with Xe plasma FIB.