Sample topography characterization at low keV is an essential SEM function, because less beam penetration depth enhances topographical contrast and reveals fine surface details — details which would not be evident at higher beam energies due to the electron transparency of charging samples. To enable more efficient characterization of non-conductive, beam-sensitive or outgassing samples when using low keV imaging, TESCAN has launched the new MultiVac module for TESCAN SEMs.
MultiVac operates in N2 and H2O atmospheres as well as at extended variable pressure (10-500 Pa). MultiVac’s gaseous secondary electron detector (GSD), when used in H2O atmosphere, enhances contrast and enables high resolution imaging at low keV and low current for topographic characterization on charging or beam sensitive samples. Additionally, MultiVac seamlessly integrates with TESCAN SEMs and is controlled directly from TESCAN’s Essence™ software, to make high quality characterization effortless and accessible to all users.
Learn more about using TESCAM MultiVac here.
Read more about the new TESCAN MultiVac – Press Release.